摘要
激光用减反射膜要求镀膜后的基片可以在激光的输出波长处剩余反射率低于0.1%,从这一要求出发,优化设计了两种不同的膜系,并根据膜系的需求采用了两种不同的监控方法,结果发现,使用光学膜厚控制膜层厚度的精度高,误差小,可以在一定程度上提高成品率.使用光学膜厚控制手段成功地制备出用于激光系统的单点632.8nm处剩余反射率低于0.05%,表面形貌均匀且无较大起伏的优质减反射膜.
It is necessary to design and deposit a super antireflection (AR) coating with the reflectance less than 0.1% at the laser wavelength in laser system. To meet this demand, two AR coatings were made by two monitoring methods respectively according to the design. From the results, it could be find that the thickness of the film made by the optical monitoring technology has high precision and little error. AR coatings with the reflectance less than 0.05% at 632.8 nm has been successfully made under several experiments using the optical monitoring technology, which has an even surface without obvious wave.
出处
《哈尔滨工业大学学报》
EI
CAS
CSCD
北大核心
2005年第6期804-805,809,850,共4页
Journal of Harbin Institute of Technology
基金
国防科工委资助项目(MKPT-01-111(ZD)).
