ST切型石英膜片的应力分析

Stress Analyzing of ST Quartz Membrane

通常石英膜片的应力分布是根据弹性力学薄板弯曲理论分析得到的,但所选模型及边界条件相对简单,不能满足实际工程的需要。文中的ST切型石英膜片的边界条件复杂,用弹性力学薄板弯曲理论是很难得出结果的,为此采用了有限元法对ST切型石英膜片进行应力分析,并根据其应力分布规律,得出合理安放SAW(表面波)谐振器的位置。

The stress distribution of a quartz membrane could be calculated by the elastic theory of plates and shells, but for simple geometry and simple boundary conditions, this method can't meet engineering demands. The finite element method is used to calculate the stress distribution for a rectangular ST quartz membrane with a central hole upon which a constant pressure acts. The stress distributions on the ST quartz membrane are given as the functions of several different radii and membrane thickness. The position of SAW pressure sensors can be determined by use of the stress distributions.