欧姆接触电阻率的精确测量方法

An Accurate Measurement Method of Specific Ohm-contact Resistance

分析了一般测量接触电阻率的TLM模型以及“端电阻”修正模型的缺点,提出了一种新的接触电阻率的测试方法。此方法模型精确,常规测试条件下容易得到误差小于1%的相关测试量的值,使接触电阻率的测试误差小于5%。

Some disadvantages of specific ohm-contact resistance measurement by usual transmission line mode(TLM) and end-resistance correction model were discussed through strict theoretical analyses. Meanwhile, a new method for specific ohm-contact resistance measurement was schemed out. The new model is accurate. Under usual measurement conditions, it is easy to get the accuracy of measured data within 1%. So the accuracy of the specific ohm-contact resistance measurement may be within 5%.