摘要
本文研究了热喷涂分解法制备Sb:SnO2电热膜的工艺及基体对电热膜电学性能的影响,并讨论了该膜的电阻温度系数的变化.实验表明:喷涂工艺对掺Sb的SnO2电热膜的电学性能有很大影响.
A study is made on the spray pyrolysis method for processing antimony-doped tin dioxide electron-thermal film,as well as the effect of the substrate on the electrical properties of the film.Besides,variation of the temperature coefficient of resistance is discussed.Experiments show that this processing method exerts a strong influence on the electrical properties of the antimony-doped tin dioxide electro-thermal film.
出处
《内蒙古工业大学学报（自然科学版）》
2004年第3期205-208,共4页
Journal of Inner Mongolia University of Technology：Natural Science Edition
基金
内蒙古工业大学校基金项目
关键词
电热膜
简并半导体
电阻温度系数
electro-thermal film
degeneration of semiconductors
temperature coefficient of resistance
