摘要
采用射频磁控溅射法制备了Ba_(0.6)Sr_(0.4)TiO_3(简称BST)薄膜材料,研究了BST薄膜的组成、晶体结构、表面形貌及介电性能。介电偏压特性曲线和电滞回线都表明其具有铁电性,厚度为500nm、晶粒尺寸为30nm的BST薄膜,介电系数电压变化率(介电调谐率)为29.4%,矫顽场强(EC)约为12.1kV/cm,并讨论了介电偏压特性曲线和电滞回线之间的联系,解释了电滞回线不对称的原因。
Barium strontium titanate (BST) thin films were prepared by RF magnetron sputtering. The composition, crystalline structure, surface morphology and dielectric properties of BST thin films were studied. The ferroelectric properties were demonstrated by the curve of capacitance-voltage and the hysteresis loop. The tunability and the coercive electric field of the BST film, with thickness of 500 nm and grain size of 30 nm, are 29.4% and 12.1 kV/cm respectively. The origin of the asymmetric hysteresis and the relationship between the curve of capacitance-voltage and the hysteresis loop are also discussed.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2005年第2期96-99,共4页
Chinese Journal of Vacuum Science and Technology
基金
国家973项目资助(Z01)