非平衡磁控溅射类金刚石薄膜的特性

Properties of Diamond Like Carbon Films Prepared by Unbalanced Magnetron Sputtering

非平衡磁控溅射(UBMS)结合了普通磁控溅射(MS)和离子束辅助沉积的优势,易于实现离子镀,近年来得到了广泛的应用。采用该技术制备的类金刚石薄膜(DLC)具有许多独特的性质。本文研究了非平衡磁控溅射技术制备DLC薄膜的光学、机械,电学和化学性能。研究表明,非平衡磁控溅射制备的DLC膜具有较宽的光谱透明区,且表面光滑、摩擦系数小、耐磨损、抗化学腐蚀,同时具有较高的电阻率和良好的稳定性。

Hydrogen free, diamond-like carbon (DLC) film was grown by a newly developed technique called unbalanced magnetron sputtering (UBMS), a technique combining conventional magnetron sputtering and ion-assisted deposition. Some of the physical properties of the film were tentatively studied. The preliminary results show that the DLC film, grown by UBMS, displays quite a few favorable features, including smooth surface, low friction coefficient, high wear-resistance and erosion-resistance, wide optical range of transparency, high resistivity and chemical stability.