用Blanie Johs法校正椭偏光谱仪的样品选择

Sample Choice for the Calibration of Ellipsometers Using Blaine Johs Method

用BlanieJohs方法使用三种不同的样品对旋转检偏器类型椭偏光谱仪(RAE)进行了系统校正。校正实验结果表明:对于设计建立的系统,在其各元件设备处于非最佳状态下,BlanieJohs方法仍然成功完成了系统的校正任务,证明该方法具有普适性。但在校正过程中也发现:为了获得高精度的系统校正结果,使用的校正样品并非如BlanieJohs方法介绍的没有限制,而是需要进行一定的选择。

A calibration method for rotating analyzer type ellipsometers(RAE) introduced by Blaine Johs is applied to calibrate the RAE system setting up in our laboratory.A series of samples are used in this calibration procedure.The calibration results further confirm that the Blains Johs method is suitable for the calibration of the general RAE system even if the optical responses of the optical components are not optimal. At the same time, the calibration results also show that the calibration results with high precision are needed for the general RAE system,the samples still need to be chosen.This result is not consistent with that of Blaine Johs method.The reasons for it are given.