碱催化溶胶-凝胶二氧化硅薄膜的制备

Preparation of silica films by means of sol-gel process catalyzed by alkali

采用溶胶-凝胶法,以正硅酸乙脂为原料,NaF、氨水溶液作为催化剂制备SiO2薄膜,研究了催化剂的种类、浓度、加入量及反应温度对正硅酸乙脂胶凝化过程中水解、聚合及胶凝时间的影响,观察比较了SiO2薄膜的表面形貌.(加入)催化剂和(提高)反应温度均可大大缩短胶凝时间,并可得到具有网状结构的SiO2薄膜.

Catalyzed by NaF and NH3·H2O, silica films were prepared with the tetraethyl orthosilicate (TEOS) sol-gel. The effects of the category, concentration and addition amount of catalyst, as well as of the reaction temperature on the kinetics of hydrolization, polymerization and gelatinization of TEOS were investigated, and the surface morphology of the prepared silica films observed. It was found that the gelatinization time could be considerably shortened and a cellular silica film was formed by adding the catalyst and increasing reaction temperature.