摘要
利用金属有机化学气相沉积(MOCVD)技术在蓝宝石衬底上生长一层高质量的ZnO薄膜。为了考察沉积温度对样品的非线性特性的影响,在200～500℃生长了一系列ZnO薄膜。用X射线衍射谱(XRD)及扫描电镜(SEM)对样品结构进行了评价。以Nd:YAG激光器输出的1.06μm的激光为基频光,对ZnO薄膜样品的二阶及三阶非线性光学特性进行了实验研究。实验发现,对于250℃沉积温度的样品有较强的非线性效应,实验测得的二阶非线性极化张量χ(2)ZZZ=9.2pm/V,三阶有效非线性系数χ(3)=5.28×10-20m2/V2。
The nonlinear optical properties of ZnO thin films deposited by metalorganic chemical vapor deposition (MOCVD) technique are investigated. ZnO films are deposited on sapphire substrates at 200-500°C. XRD and SEM are used to investigate the crystalline quality. 1.06 μm wavelength beam output from a Nd:YAG laser is used as fundamental beam. The second-order and third-order susceptibility is studied. By comparing the second harmonic signal generated in a series of ZnO films with different growth temperatures, we conclude that a significant part of second harmonic (SH) signal is generated at the film deposited at appropriate temperature. The dependence of SH on the deposited temperatures is discussed. The second order susceptibility tensor χzzz(2) = 9.2 pm/V and third-order susceptibility χ(3) = 5.28 × 10-20 m2/V2 are deduced for a film deposited at 250°C.
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2005年第3期265-271,共7页
Optics and Precision Engineering
关键词
二次谐波振荡
金属有机化学气相沉积
二阶极化率
三阶极化率
沉积温度
Metallorganic chemical vapor deposition
Neodymium lasers
Scanning electron microscopy
Second harmonic generation
Substrates
Thermal effects
Thin films
X ray diffraction analysis
Zinc oxide
