微电铸及其在MEMS中的应用

Theory and Application of Micro-electroforming in MEMS

研究了微电铸在MEMS结构层制造工艺中的可行性并搭建了微电铸实验系统,通过对不同Watts镍电解液的成分实验得到了一组性能较好的成分配比.通过晶种层材料的实验得出TiCu作为晶种层材料的优点.利用微电铸的方法制作出微机械隧道陀螺仪中的悬臂梁、挡板、驱动电极等,得到了一组比较有价值的电铸参数,并对电铸中存在的问题进行了阐述.实验结果表明,采用方波脉冲电铸能够得到晶粒粗细均匀、硬度和应力符合设计要求的悬臂梁等MEMS结构.

The feasibility of Micro-electroforming on the fabrication of structural layer in MEMS was researched.An experimental system of Micro-electroforming was established.A appropriate kind of Watts components was found by comparing with several kinds of Watts components.The merit of Ti-Cu crystal seeded layer was found by comparing with other materials.Cantilever,baffle and drive-electrode in Micro machined tunneling gyroscope were fabricated by Micro-electroforming,and some valuable experimental parameters were obtained.The problems in the process of Micro-electroforming were discussed and solved.Experimental result indicates that cantilever and some else structural layers in MEMS can be fabricated by Micro-electroforming.