摘要
准分子激光系统中的电磁干扰问题在许多应用中,特别在医疗设备中是不可忽视的一个问题。文中描述了准分子激光器中的电磁干扰的来源和干扰途径,并详细从激光放电回路、激光腔和软硬件设计角度讨论了抑制电磁干扰和提高系统可靠性的方法。
Electromagnetic interference (EMI) in excimer laser system is an effct which can not be ignored in many applications, especially in medical devices. The sources of EMI were described. The methods in which suppress the EMI and improve system's security in terms of discharge circuit, laser cavity, hard- software designs were discussed.
出处
《光电子技术与信息》
2005年第3期24-26,共3页
Optoelectronic Technology & Information
关键词
准分子激光
电磁干扰
放电回路
excimer laser
electromagnetic interference
discharge circuit
