双框架硅微型机械振动陀螺仪鲁棒控制研究

Robust Control for Double-gimbal Vibratory MEMS Gyroscope

以内框驱动式双框架硅微型角振动机械陀螺仪为对象,建立了闭环力平衡控制模型,采用鲁棒H∞控制理论中的混合灵敏度法设计了鲁棒控制器。仿真结果表明,同开环微机械陀螺相比,通过合理选择加权函数设计出的鲁棒H∞控制器能使微机械陀螺对敏感轴固有频率摄动敏感性显著降低,微机械陀螺鲁棒性能显著提高。

A robust H infinity control scheme for the conventional model of operation of z-aixs double-gimbal vibratory MEMS gyroscope is presented. The scheme is realized by a force-balancing feedback scheme. The realization of this H infinity control gyroscope is demonstrated in a double-gimbal vibratory gyroscope with 1% error in the sense axis nature frequency. The results show that the H infinity control gyroscope proves to be robust in the nature frequency error in comparison with the conventional open-loop gyroscope.