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Simulation and analysis of effects of Young’s modulus of isolation material on natural frequencies of the sensor package and displacement of the chip

Simulation and analysis of effects of Young’s modulus of isolation material on natural frequencies of the sensor package and displacement of the chip
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摘要 For the first time an anti-shock packaging model of an acoustic-vibration sensor system has been designed by using the shocking isolation principle. The finite element analysis has been applied for design and simulation of the model. The effects of Young’s modulus of anti-shock rubber on naturally occurring frequencies of the combination of rubber and an acoustic sensor chip were analyzed. The displacement of the acoustic sensor chip is loaded with force. The results of static analysis and harmonic analysis show that while increasing Young’s modulus of anti-chock rubber, the first five natural frequencies of the package body also increases. Yet the displacement of the acoustic sensor chip around the resonant frequency decreases. The results of static and transient analysis show that the displacement of the acoustic sensor chip decreases with the increase of Young’s modulus of anti-chock rubber being loaded with either transient force or static force at the bottom of the combination of rubber and acoustic sensor chip. For the first time an anti-shock packaging model of an acoustic-vibration sensor system has been designed by using the shocking isolation principle. The finite element analysis has been applied for design and simulation of the model. The effects of Young’s modulus of anti-shock rubber on naturally occurring frequencies of the combination of rubber and an acoustic sensor chip were analyzed. The displacement of the acoustic sensor chip is loaded with force. The results of static analysis and harmonic analysis show that while increasing Young’s modulus of anti-chock rubber, the first five natural frequencies of the package body also increases. Yet the displacement of the acoustic sensor chip around the resonant frequency decreases. The results of static and transient analysis show that the displacement of the acoustic sensor chip decreases with the increase of Young’s modulus of anti-chock rubber being loaded with either transient force or static force at the bottom of the combination of rubber and acoustic sensor chip.
出处 《Journal of Harbin Institute of Technology(New Series)》 EI CAS 2005年第3期295-299,共5页 哈尔滨工业大学学报(英文版)
基金 Sponsored by the Creativity Ability Fund Project for Cadreman of General Provincial University of Heilongjiang(Grant No.1053G033).
关键词 传感器 震动隔绝 抗震橡胶 有限元分析 sensor packaging shock isolation anti-shock rubber finite element analysis
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  • 1[1]Michael C B et al. Microassembly Technologies for MEMS. Part of the SPIE Conference on Structures and MEMS for Optical Processing, 1998; 3513:2
  • 2[2]Chad B et al. Challenges in the Packaging of MEMS. International Symposium on Advanced Packaging Material, 1999; 41
  • 3[3]Von Arx J. Hermeticity Testing of Glass-Silicon Packages with On-Chip Feedthroughs. The 8th International Conference on Solid-State Sensors and Actuators, and Eurosensors, 1995; 244
  • 4[4]Mutschall D et al. Basic Micro Module for Chemical Sensors with on Chip Heater and Buried Sensor Structure. 8th International Conference on Solid-State Sensors and Actuators, and Eurosensors, 1995; 256
  • 5[5]Mayer F et al. Flip-Chip Packaging for Smart MEMS. Part of the 1998 SPIE on Smart Electronics and MEMS, 1998; 183
  • 6[6]Bossche A et al. MEMS Packaging: State of the Art and Future Trends. Part of the 1998 SPIE on Smart Electronics and MEMS,1998; 166
  • 7[7]Rao Tummala R. SLIM: Third Generation of Packaging Beyond MCM,CSP, Flipchip Micro-via Board Technologies. 1998 IEEE/CPMT Electronics Packaging Technology Conference, 1998; 1

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