10^5g压阻式加速度微传感器实时自补偿技术的研究

Research on realtime self-compensation technique of 105g piezoresistance acceleration micro sensor

针对测试105g压阻式加速度微传感器的温度补偿问题,本文从温度补偿的基本原理出发,通过推理和演绎,得出温度补偿公式。提出用软件编程和DSP的方法对传感器进行温度补偿,实现了传感器温度补偿的实时性和智能化。并提供了相应的实验数据,证明所提出的实时自补偿方法是切实可行的。

Contraposing the 105g piezoresistance acceleration micro sensor of temperature compensation problem,this paper deduce the formula of temperature compensation from the ultimata of temperature compensation.It presents that the micro sensor is compensated in temperature by the method of programme and DSP to actualize the character of realtime and brainpower in the temperature compensation of micro sensor.This paper provides the relative experiment data to prove that the method of the realtime self-compensation is feasible.