基于亚像素综合定位匹配算法的MEMS平面运动测量

Measurement of In-Plane Motion for MEMS Based on Sub-Pixel Synthetical Orientation and Matching Algorithm

动态测试对MEMS的设计、制造和可靠性具有非常重要的意义.提出了快速高精度的综合亚像素定位匹配算法,应用于MEMS平面运动测量.该综合算法把标准化协方差相关法、亚像素步长相关法、曲面拟合法、序惯相似性检测算法和单纯形法有机结合,综合运用各算法的优点,达到了提高亚像素定位速度和精度的目的.通过位移测量实验和对硅微陀螺仪质量块面内振动及谐振频率的测量,验证了该综合算法的可行性和有效性.

The dynamic measurement technique is very important for the design, manufacture and reliability of MEMS. In this paper, a sub-pixel synthetical localization algorithm with high resolution and high speed is proposed for testing in-plane motions of MEMS. This algorithm, which incorporates the advantages of standardization covariance correlation method, sub-pixel step length correlation algorithm, surface-fitting algorithm, sequence similarity detection algorithm(SSDA), and simplex method,has high resolution and high speed. The feasibility and validity of the synthetical algorithm are illustrated with the experiment for testing displacement and the measurement of in-plane vibration and resonant frequency of a microgyroscope.