多层超薄薄膜介质光热辐射的三维理论研究

Study on the three-dimensional theory of super thin multi-layered films irradiated by the continuously modulated laser

在柱坐标系下,以热传导方程及边界条件为基础,通过Hankel变换及逆变换,得到多层热单介质膜中的温度场.以特殊参数为例,对膜层为三层时的特殊情况进行讨论,得知对于高热扩散率的薄膜材料,纵向和横向的热导率比值越大,相位的变化也越大.低热扩散率薄膜材料,不同的纵向和横向的热导率比对光热信号的影响很小.同时,光吸收系数越小,频率变化对相位影响越明显.

On the basis of heat conduction equations and under special boundary conditions, the temperatute fields of multilayered heated uniaxial films can be acquired in the cylindrical coordinate system by Hankel transformation and retransformation. As an example with specific parameters, the special growth conditions for three-layered films are discussed. The larger are the lognitudinal heat conductions vs transverse ones of thin films for higher thermal diffusivity,the larger are changes of phases of the temperature fields in the thin films. However, it is faintly influencing for the lognitudinal heat conductions vs transverse ones of thin films for lower thermal diffusivity, and the smaller is light absorbing coefficient, the more evident is the influence on phases because of frequency change.