斜角入射沉积法制备渐变折射率薄膜的理论探讨

Theoretical study of graded-index coatings prepared by glancing angle deposition

从理论上分析了单一膜料倾斜入射沉积时的折射率与填充密度的关系,给出了三种不同的表达式;然后从正变和负变、完整周期和存在半周期以及不同的周期数等几个方面探讨了膜层的填充密度按照线性变化时的渐变折射率薄膜的光学特性,并将折射率的不同理论表达式对光学特性的影响进行了对比,最后讨论了单一膜料倾斜入射沉积渐变折射率薄膜的方法、填充密度线性变化时的渐变折射率薄膜的应用及制备中需要进一步解决和处理的问题.

Relationship between refractive index and packing density of coatings prepared by glancing angle deposition is analyzed and three expressions are given firstly. And then optical characteristics of the graded-index coating, which is deposited as the linear changing of packing density, are discussed from some aspects as positive or negative change, integral periods or have hale period, different periods etc, and more over, the influences of different refractive-index theories on the optical characteristics are compared. Finelly, the preparation method, applications and some problem in preparation of the graded coating are discussed separately.