子孔径拼接干涉测试技术现状及发展趋势

Status and Development Trend of Sub-Aperture Stitching Interferometric Testing Technique

子孔径拼接测试技术拓展了标准干涉仪的横向和纵向动态范围,能够以低成本、高分辨率检测大口径光学元件。按子孔径形状的不同,分别介绍了其工作原理,综述了该技术国内外20多年来的发展历史和技术现状,最后在分析比较的基础上提出了该技术研究的几个可能发展方向和应用前景。

Sub-aperture stitching testing technique extends lateral and vertical dynamic range of interferometer. The large-aperture optical components can be tested by this technique with low cost and high resolution. According to the differences of sub-aperture shapes, the working principles are outlined, respectively. Meanwhile, several representative stitching algorithms are introduced. The domestic and overseas development history and status are reviewed. Based on the analysis and comparison of them, the development trend and application prospect of this technique are pointed out in the end.