氟化类金刚石膜结构、性能及应用

Structure, properties and applications of diamond-like fluorinated carbon films

氟化类金刚石膜是基于传统类金刚石膜的基础上发展起来的一种改性材料,该膜具有许多良好的性能,包括疏水性能、电学性能、光学性能、机械性能、热稳定性以及生物相容性,因此引起了人们的极大关注。本文介绍了氟化类金刚石膜的结构、性能、应用领域和发展趋势。

The diamond-like fluorinated carbon film, as a conventional modified material, is developed on the basis of the diamond-like carbon films. It has many good properties, such as hydrophobicity, electrical/optical/mechanical properties, thermal stability and biocompatiblity, to attract more people's concern. Introduces the structure and properties of diamond-like fluorinated carbon film, as well as the fields of its application and developing trend.