摘要
动态流导法真空校准装置是真空计量的标准,可用于高真空和超高真空规的校准,真空度的校准范围为10-1～5×10-7Pa,合成标准不确定度为0.69%～1.4%。
Dynamic flow conductance is used to calibrate vacuum systems to offer a metrological standard for vacuum, which is available to the calibraction of HV and UHV gauge. Its vacuum calibration range is from 10^(-1) to 5×10^(-7) Pa, with an uncertainty of the standard for combined calibration up to 0.69%～1.4%.
出处
《真空》
CAS
北大核心
2005年第3期30-34,共5页
Vacuum
关键词
真空标准
真空校准
真空规
vacuum standard
vacuum calibration
vacuum gauge
