基于数据挖掘的制造过程合格率管理体系研究

Study on Yield Management System of Semiconductor Manufacturing Process Based on Data Mining

在半导体自动化制造过程中产生大量的数据,为应用数据挖掘技术进行有效的过程监控提供了条件。提出在运用数据挖掘技术中聚类分析方法的基础上,对不合格批产品的加工路径进行分析,从而准确地将控制对象定位于某些问题设备,并结合统计过程控制的手段加强监控。

Data Mining technology can extract valuable information and knowledge from an increasing number of raw data. A lot of data are available during semiconductor manufacturing process, which can possibly be analyzed by data mining technologies. This article introduce a yield control system based on data mining and critical path analysis. Statistical process control is applied to critical equipment.