双四象限光电探测器在线测试虚拟仪器

On-line inspection virtual instrument with double four quadrant photoelectric detector

通过监测与所接收的激光弥散斑相对应的输出信号的变化率可以对探测器进行实时非接触测量,从而实现以双四象限探测器为接收器件的产品的在线检测和质量控制。介绍了以Labwindows/CVI为开发平台的双四象限探测器的测试、分析系统。建立了探测器接收弥散斑与输出信号变化率的关系模型,采用三次样条插值函数提高欠采样时ns级极窄光电脉冲信号峰值的求取精度。通过实验得到了探测器接收弥散斑与光敏面直径的最佳比值为0.5。研究结果表明,弥散斑直径测量的分辨力为0.0096mm,峰值电压测量幅值分辨力0.1mV。

A Virtual instrument is proposed for the purpose of on-line inspection and quality control of the product with double four quadrant photoelectric detector as its receiver through real-time and non-contact inspection of the change ratio of output signals corresponding to dispersion spots received by the detector. The paper describes the measurement and analysis system with double four quadrant photoelectric detectors based on Labwindows/CVI platform and the relation model between dispersion spot and output signal change ratio. The precision of peak value photoelectric signal can be improved by cubic spline interpolation for deficient sampling nanometer-order narrow pulse photoelectric signal. Experiments show that the optimal-value of the ratio of laser spot diameter to detector photosensitive area is 0.5, resolution of spot diameter 0.0096 mm and resolution of signal peak value 0.1 mV.