CMOS风速风向传感器的设计

Design of CMOS wind velocity and direction sensor

介绍了一种CMOS(互补MOS)集成风速风向传感器,使用恒温差(CTD)控制模式将芯片加热,使其中间加热区域的温度高于周围环境(风)温度一定值。该传感器在有风吹过它的表面时能同时测量风速和风向。采用4个串联的热堆测量芯片中心区域的平均温度,这种测温的方法简单、新颖。在简单阐述CMOS硅热流量传感器的工作原理和结构之后,主要介绍驱动和信号读取电路。经过风洞测试,传感器能够测量风速0～23m/s,具有良好的线性度和灵敏度,同时,传感器360°内方向敏感。

A kind of CMOS integrated wind velocity and direction sensor is introduced.The surface of the chip is heated under CTD controlling mode to get a constant temperature difference between the center of the chip and the surroundings (gas).As gas passing through the surface of the sensor,both the velocity and the direction of the wind can be obtained.Four serial thermopiles are used to measure the average temperature of the sensor.The method is rather simple and new.The operation principle and structure of CMOS silicon thermal flow sensor is presented first;the control and read out circuits are given later.After the test in a wind tunnel,the sensor can measure the wind velocity in 0~23m/s with good linearity and can sense the derection of 360 degrees.