静电放电电磁脉冲理论建模与作用机理研究进展

Modeling of electrostatic discharge elect romagnetism impulse theory and the development of the study of function mechanism

通过静电放电效应实验和理论分析,研究了IEC6100042标准规定的实验方法与实验平台的局限性,提出了改进的ESD电磁场理论模型,探讨了静电放电电磁脉冲对微电子器件作用机理,提出了相应防护对策。

Based on the experimental and theoretical analysis of Electrostatic Discharge effect,the paper discusses about limitation of the experiment method and experiment flat which prescribed by IEC61000-4-2.It presents the improved ESD electromagnetic field theory model,and explores the function mechanism of microelectronic device from electrostatic discharge elect romagnetism impulse,puts forword the corresponding protection countermeasure.