X-Y精密定位平台中宏平台进给系统模型辨识

The Modeling of a Two Dimensional Servo System for Precise Positioning Mechanism

针对所研制的X-Y精密定位工作台系统的设计要求,采用分析建模法,求出了宏平台进给系统的传递函数,通过实验获取宏平台进给系统的摩擦模型。基于进给系统的摩擦补偿,分别运用谱分析法和最小二乘法辨识出宏平台进给系统的频域响应及Z传函。实验结果表明,获得有效的进给系统数学模型为精密定位工作台控制器设计工作提供了依据。

<Abstrcat> In this paper, according to the design requirement of the precise stage, the transfer function of a two dimensional precise positioning mechanism is analyzed. A simplified friction model is obtained at first. Based on the friction compensation, the model of frequency response and the z transfer function are estimated by using spectral analysis and least square estimation algorithm respectively. The experimental results illustrate the effectiveness of the identified models of the servo system, thus lay a solid foundation for the design of the control system of the precise positioning mechanism.