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掩膜立体成型中平行光边缘衍射问题分析 被引量:1

Analysis of Problem of Fresnel Parallel Light Straight-edgeDiffraction in Mask Stereolithegraphy
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摘要 利用Matlab对菲涅尔平行光直边衍射问题作了定量的分析,计算了幕上直边挡板边缘处的相对光强及衍射光能到达阴影处的极限坐标;详细分析了屏上的相对光强分布以及光强的走势及复色光的边缘衍射问题;利用Matlab对菲涅尔积分的处理推广了科纽卷线的应用,而对复色光边缘衍射问题的研究则实现了衍射光在边缘处的光强的大致平均分布。 The problem of Fresnel parallel lights straight-edge diffraction is analysed quantitatively by using Matlab tool. The relative light intensity distributed on the boundary of straight-edge baffle in the viewing screen and the limit coordinate that diffraction light can reach to the shadow are calculated. The relative intensity distribution of the screen and the direction of light intensity are analysed in detail. The approximately evenness distribution of diffraction light intensity on the boundary can be approached by the research of polychromatic light boundary diffraction . This method extends the application of Cornu spiral and proposes a new way to analyse boundary problem of other diffraction.
作者 朱庆 于殿泓
机构地区 西安理工大学
出处 《工具技术》 北大核心 2005年第6期74-76,共3页 Tool Engineering
基金 西安理工大学博士启动基金资助项目
关键词 掩膜立体成型 平行光 边缘衍射 科纽卷线 菲涅尔衍射 Matlab, Cornu spiral, Fresnel diffraction
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