扩散硅压力传感器热灵敏度漂移补偿方法的研究

Research on Compensating Method for Thermal Sensitivity Drift of Silicon Pressure Transducer

分析了恒压源供电和恒流源供电两种情况下扩散硅压力传感器的灵敏度随温度变化的关系式,提出了用软件补偿其热灵敏度漂移的计算方法,并且就恒流源供电且灵敏度温度系数大于零的情况,推出了用并联电阻补偿热灵敏度漂移时,并联电阻阻值的计算公式,模拟结果表明补偿效果非常显著。

The relations between sensitivity of pressure transducer and temperature were analyzed. A compensating method by using compensating software to compensate the thermal sensitivity drift was suggested. To transducer stimulated by current source and its temperature coefficient of sensitivity is positive, and used a parallel resistor to compensate its thermal sensitivity drift, an equation to calculate the compensating resistor was obtained. The simulating result indicated compensating effect was remarkable.