低阻TiO_2基三甲胺气体传感器性能分析

Analysis of performance for low resistance TiO_2-based gas sensor to trimethylamine

按旁热式结构采用以TiO2为基质对InSb2O3Nb2O5氧化物不同的重量比去掺杂研制成的三甲胺(TMA)气体传感器,大幅度降低了加热功率和其在空气中的阻值,器件对响应TMA气体具有灵敏度高、响应时间快、恢复时间短、长期稳定等特点,对干扰气体NH3具有良好的选择性。

TMA gas sensor is developed by TiO_2-based and different weight ratio of In-Sb_2O_3-Nb_2O_5 oxides doping with side-heating structure.It can greatly decrease the heating power and resistance in air,with the characteristic of high sensitivity,short response and recovery time,long-term stability for response TMA gas,and with perfect selectivity for the disturbance of NH_3.