电涡流传感器在铝箔厚度测量中的应用

Application of eddy current sensor in measuring thickness of aluminum

采用双频激励的低频透射式电涡流传感器在线测量铝箔厚度,同时,检测了铝箔表面温度,从而实现了多参数检测。为了减小传感器的非线性误差,消除铝箔厚度及其表面温度间的交叉敏感对其厚度检测所带来的影响,采用免疫算法实现多参数数据拟合。实测结果表明这种数据拟合消除了铝箔表面温度对铝箔厚度测量的影响,提高了检测精度,测量范围达到1～100μm,分辨力达到0.01μm。

Transmissive eddy current sensor inspired by two sine signals with different frequencies is used to measure the thickness of aluminum foil and the temperature of the surface of aluminum foil on line.And multi-parameter measurement is realized.In order to reduce the no-linear error and cross-sensitivity,immunity algorithm is used to fulfill multi-parameter data fitting.Measurement results show that this kind of data fitting method eliminates the effect of the temperature of the surface of aluminum foil on the measurement of the thickness of aluminum foil,and the measurement precision is increased.The measuring range can reach 1~100μm,the resolution 0.01μm.