CoSi_2薄膜二维X射线衍射线形分析与表征

ANALYSIS AND CHARACTERIZATION OF 2-D X-RAY DIFFRACTION PROFILE FOR CoSi_2 FILM

利用二维X射线衍射线形分析方法,分析了CoSi2薄膜材料的二维衍射线形.结果表明,薄膜中不同方位的衍射线形存在明显差异,主要与材料中晶粒尺寸及显微畸变的空间分布有关,其中沿薄膜法线方向上的晶粒尺寸最大,同时该方向的显微畸变最小.

The profile analysis method of 2-D X-ray diffraction was used to analyze the COSi2 film. The results show that there are evident difference between diffraction profiles from different directions of the film, which relates mainly to the space distributions of the grain size and the micro-distortion in film materials. Along the normal direction of film, the materials exhibit the maximum grain size and the minimum micro-distortion.