铁电薄膜材料及其相关问题研究进展

Research Progress in Ferroelectric Thin Film and Related Aspects

铁电薄膜材料是目前国际上研究的热点之一。综述了铁电薄膜及其制备技术研究的新进展,介绍铁电薄膜材料的性能及应用,并重点分析了铁电薄膜不同制备技术的优缺点,指出了目前关于铁电薄膜研究中的一些重要问题。

Ferroelectric thin film is one of the research focus recently.Recent studies on ferroelectric thin films and the related processing methods are reviewed.The performance and the application of ferroelectric thin films are described in this paper.The advantages and disadvantages of different processing methods for ferroelectric thin films are discussed especial- ly.Some important aspects in ferroelectric thin film are outlined.