摘要
采用 Sol-gel 法在 Pt/Ti/SiO_2/Si 和 Ag/Al_2O_3基片上制备厚度为2～14μm 的 Ba_(0.6)Sr_(0.4)TiO_3(BST)铁电厚膜材料。经高能球磨细化和表面改性后的 BST 陶瓷纳米粉体分散到 BST 溶胶中,通过甩胶法,形成0-3型 BST 厚膜材料。XRD 图谱显示,BST 呈现纯钙钛矿相结构;SEM 照片显示,BST 厚膜均匀致密、无裂纹;介电性能测试结果表明,当测试频率为 1kHz,温度为25℃时,介电常数为620,介电损耗为0.6。
A modified sol-gel method is introduced to prepare thick films of barium strontium titanate(Ba_(0.6)Sr_(0.4)- TiO_3,BST)with series thickness of 2～14μm on both Pt-coated oxidized Si(Pt/Ti/SiO_2/Si)and Ag/Al_2O_3 substrates,cer- tain quantum fine-sized and modified BST ceramic powder,milled with a high energy ball milling machine,is dispersed into the BST sol-gel solution.0-3 ceramic/ceramic composites are fabricated by using spin-coating method.The surface morphology and structural properties of the films are studied with SEM and XRD respectively.It is revealed the thick films exhibit a pure perovskite phase and are crack free,homogeneous,compact.The dielectric properties of thick films are investigated by C-F, the dielectric constant and the loss tangent are about 620 and 0.6,respectively,at 25℃ and 1kHz.
出处
《材料导报》
EI
CAS
CSCD
北大核心
2005年第5期102-104,96,共4页
Materials Reports
基金
上海市重点科建设项目资助(2002CB613304)
