溶胶-凝胶法制备钛酸锶钡铁电薄膜的研究

Preparation of (Ba,Sr)TiO_3 thin films by sol-gel method

钛酸锶钡(BST)薄膜是一类重要的铁电薄膜材料。采用溶胶-凝胶法制备了不同组分的具有钙钛矿结构的BST薄膜。利用X射线衍射技术(XRD),研究了不同退火条件下BST薄膜的结晶特性,结果表明制备的BST薄膜形成了单一的钙钛矿结构;利用扫描电子显微镜(SEM)和原子力显微镜(AFM)观察了薄膜的表面形貌,结果表明制备的BST薄膜光滑,平整,无明显的孔洞和裂纹,且生长良好。BST薄膜的晶粒细致,排列整齐,分布均匀,呈现球状。

Barium strontium titanate(BST) thin films are one kind of important ferroelectric thin films.(Ba,Sr)TiO_3 thin films with perovskite structure are fabricated by sol-gel processing.The crystallization properties of the BST thin films with different annealing conditions are investigated by XRD analysis and the result shows that all the BST thin films form a single perovskite structure.The SEM and AFM analysis show that the BST thin films have a smooth and flat surface,and have no apparent pores and cracks.The small and spherical crystal grains are fine and arranged in good order and well-distributed.