用发射天线式微波等离子体CVD装置沉积大面积金刚石薄膜

The Synthesis of Large-Area Diamond Films Using Quartz Bell Jar Type Microwave Plasma CVD

在国内首次研制成功了高气压发射天线式微波等离子体辅助化学气相沉积金刚石薄膜装置，用该装置成功地在３英寸的单晶硅衬底上沉积了Φ７０ｍｍ的金刚石薄膜。这一成果填补了国内空白，对我国金刚石薄膜研究领域的设备更新换代和开发应用具有重要意义。

A quartz bell jar type microwave plasma chemical vapour deposition system for diamond films wasbuilt for the first time in China,With it,large- area diamond films(about Φ70mm)were successfullydeposited on the single- crystal silicon wafers of 3-inch diameter.This will play an important role in theresearch of diamond films on our country.