超二代微光多碱阴极光学／光电工艺监控原理分析及设计考虑

THE PRINCIPLE AND DESIGN OF Ⅱ^(+) GENERATION MULTI-ALKALI PHOTOGATHODE PROCESSING MONITOREDWITH OPTICAL/OPTOELECTRONIC METHODS

本文主要依据法国Ｐ·道里兹的成果和我们自己的实践体会，总结多碱阴极薄膜晶体生长的光学光电监控原理、理论基础和系统设计考虑，分析影响检测精度的七种因素和改进措施。最后，提出改进阴极衬底和过渡层结构以进一步挖掘多碱阴极灵敏度潜力的几点设想。

The optical/optoelectronic monitoring principle,theory basis andinstrumentation system design are described.The affect of seven factors on themeasurement accuracy is analysed respectively. Finally,some ideas of improvingthe performances of both photocathode substrate and transition layer structuregfor enhancing the sensitivity of Ⅱ +Generation multi-alkali photocathode aregiven.