摘要
推导出在四边形二维PSD光源静止照射和连续扫描照射下的位置响应特性理论解,比较两种光源照射方式下引起相对位置变化,讨论了光源扫描速度对探测光入射位置信息的影响,得出结论:在两种光源照射方式下,二维PSD探测光入射位置存在严重的非线性,但是响应时间比一维PSD短。光源扫描速度越小,2DPSD探测到的位置误差越小,并且光生电势分布的最大值越小。
The theoretic solutions of position response characteristic of two-dimensional tetra-lateral PSD illuminated by the static and moving light source were solved. By comparing position detected by PSD for two illuminated modes of light, the impact of scanning speed of light source on the detected positions was analyzed. Results show that there is badly non-linear on positions detected by PSD for two illuminated modes of light, but the response time of 2D tetra-lateral PSD is shorter than 1D PSD. The lower the scanning speed of light is, the less the position error detected by 2D PSD and the distributing maximum of photo voltage are.
出处
《光学技术》
EI
CAS
CSCD
北大核心
2005年第3期445-448,共4页
Optical Technique
关键词
响应特性
PSD
四边形
扫描
静止
response characteristic
PSD
tetra-lateral
scanning
static
