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MEMS传感器的真空密封技术 被引量:1

Vacuum Encapsulation Technology for MEMS Sensors
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摘要 文章介绍了MEMS传感器的几种真空密封方法,提出了一种真空密封方法的设想。 Methods currently used for vacuum encapsulation of MEMS sensors are described, and a new technique for vacuum package is proposed in the paper.
出处 《微电子学》 CAS CSCD 北大核心 2005年第3期268-269,274,共3页 Microelectronics
基金 国家高技术研究发展(863)计划"MEMS重大专项B类项目"资助(2003AA40402)
关键词 MEMS 传感器 谐振梁 压力传感器 真空密封 MEMS Sensor Resonant beam Pressure sensor Vacuum packaging
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