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超硬多层薄膜的研究现状及展望 被引量：2

Research Status and Prospects of Super-hard Multi-layer Thin Films
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摘要 　由于超硬多层薄膜的性能随调制周期的变化而发生变化,在某一范围出现超硬等异常效应。其潜在的实际应用价值及理论意义,使其成为近年来人们研究的热点。本文综述了近年来国内外超硬多层薄膜的研究结果,介绍了其分类、主要性能特点以及制备工艺,并对超硬多层薄膜以后的发展趋势进行了展望。 Properties of super-hard multi-layer thin films vary with the change of the modulation period.Super-hardness effect was observed at a specific range of modulation periods. Hence the properties of super-hard multi-layer thin films have been paid considerable attentions in recent years because of potential technological applications and theoretical significance. The research results of properties of super-hard multi-layer thin films, classification, properties, synthesis technologies and process were reviewed. The prospect on the development of super-hard multi-layer thin films was also given.
作者 宋绪丁 李宁
机构地区 长安大学工程机械学院
出处 《表面技术》 EI CAS CSCD 2005年第3期5-8,12,共5页 Surface Technology
关键词 超硬多层薄膜 超晶格薄膜 纳米多层膜 类金刚石 Super-hard multi-layer thin films Super-lattice films Nano-multilayer films Diamond-like carbon
分类号 TG174 [金属学及工艺—金属表面处理]
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参考文献45

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共引文献86

同被引文献38

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引证文献2

二级引证文献1

表面技术
2005年 第3期

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