宽量程Pirani真空传感器

A LOW COST WIDE RANGE PIRANI GAUGE

利用测量热丝上脉冲电压上升率可以测出和滞区真空度原理，可以在传统Ｐｉｒａｎｉ传感器的检测量程扩展一倍，实验证实：只要传感器参数与检测线路参数设计恰当，在０．１ｐａ～１×１０５Ｐａ间有较好线性．借藉单片机同步检测、自动调另，数据处理使这一思想成为现实．

Vacuum value in viscous range may be obtained through measuring the rise edge of pulse voltage dropped on thermal filament, and the measurement range of conventional Pirani gauge may increase by one times. Experiments confirm that when the gauge parameters and related instrument are devised properly, the curve of ΔUf vs P on log-loy plot is roughly linear over the range of 0. 1 X 105Pa. Because the single-chip-computer is used for synchronizing detection, automatic zero adjustment, data processing and so on, the idea becomes true