平面光波导器件及应用分析

Analysis of Planar Optical Waveguide Devices and Its Application

分析了平面光波导器件的关键技术及其应用情况.介绍了平面光波导器件的几种不同种类,包括硅基体沉积二氧化硅光波导,铌酸锂镀金属膜光波导,聚合物(Polymer)光波导等组成.利用平面光波导技术,可制造出波分复用器、解复用器、光开关、耦合器、阵列波导光栅等各种不同的集成光学器件.

The key technology and application of planar optical waveguide are analyzed,and different kinds of planar optical waveguide devices including silicon-based silicon dioxide deposition waveguide,LiNbO3 waveguide incorporating a metal film,polymer waveguide,are presented.The integrated optical communication devices,such as WDM/De WDM,optical switch,coupler,AWG,can be manufactured by using planar optical waveguide technology.