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基于Arnoldi算法的MEMS微梁的宏建模 被引量：3

Arnoldi-Algorithm-Based Macromodeling for Coupled-Domain MEMS Device
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摘要 微机电系统通常涉及机、电、流体、热等多个耦合能量域,其设计与分析需要通过宏建模来降低复杂度。论文根据系统传递函数矩匹配原理,提出将Arnoldi算法与Taylor展开相结合来实现MEMS器件行为的宏建模,建立了典型MEMS微梁的宏模型。与有限差分法相对比,该方法可以较准确地实现MEMS器件的快速动态仿真。 Arnoldi algorithm is employed to implement model order reduction (MOR) of complex micro-electro-mechanical system (MEMS) based on Krylov subspace technique, and the Taylor series expansion is used to solve the weakly nonlinear problem. A 4-order macromodel of micro clamped-clamped electrostatic beam is established as an example to demonstrate the MOR process of coupled MEMS devices. Compared with the finite difference method, the dynamic simulation efficiency using the 4-order macromodel is improved greatly with satisfactory accuracy.
作者 吕湘连 苑伟政 李伟剑 霍鹏飞 姜澄宇
机构地区 西北工业大学微/纳米系统实验室
出处 《西北工业大学学报》 EI CAS CSCD 北大核心 2005年第3期411-415,共5页 Journal of Northwestern Polytechnical University
基金 国家自然科学基金(50375125) 博士点基金(2003069903 20040699009)资助
关键词 MEMS 宏建模 Arnoldi算法 TAYLOR展开 Algorithms Computer simulation Dynamics Electrostatics Finite difference method Nonlinear systems
分类号 TH703 [机械工程—精密仪器及机械]
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参考文献6

  • 1Senturia S D. CAD Challenges for Microsensors, Microactuators, and Microsystems. Proceeding of the IEEE, 1998,86(8): 1611～1626.
  • 2Tilmans H A C. Equivalent Circuit Representation of Electromechanical Transducers: Lumped-Parameter Systems. J Micromech Microeng, 1996, 6(1): 157～176.
  • 3霍鹏飞,马炳和,苑伟政.基于组件网络方法的微加速度计建模与仿真[J].航空学报,2003,24(5):466-470. 被引量：19
  • 4Gabby L D.Mehner J E,Senturia S D.Computer—Aided Generation of Nonlinear Reduced Dynamic Macromodels:I Non—Stress—Stiffness Case.Journal of MEMS,2000,9(2):262～269.
  • 5Silveira L M'White J.Efficient Reduced—Order Modeling of Frequency—Dependent Coupling Inductances ASsociated”ith 3-D Interconnect Structures.IEEE Transaction on Components,Packaging.and Manufacturing—Part B,1996,19(2):283～288.
  • 6Rewienski M,White J K.Improving Trajectory Piecewise—Linear Approach to Nonlinear Model Order Reduction for Micromachined Devices Using an Aggregated Projection Basis.IEEE Transactions on ComPuter-Aided Design of Integrated Circuits and Systems,2003,22(2):155～170.

二级参考文献4

  • 1Robert M K, George E K, Mikulehenko O, et al. An integrated simulator for coupled domain problems [ J ]. Journal of Micro Electro Mechanical Systems, 2001,10 (3) : 379 - 391.
  • 2Ramaswamy D, Alum N, White J. Fast coupled-domain, mixedregime electromechanical simulation[A], ln: Proc.Int Conf Solid-State Sensors and Actuators[C]. Japan: The Institute of Electrical Engineers of Japan, 1999. 314 - 317.
  • 3Gabbay L D,Senturia S D. Computer-aided generation of nonlinear reduced-order dynamic macromodels. 1. Non-stressstiffened case [ J ]. Journal of Microelectromechanical Systems, 2000,9(2): 262-269.
  • 4Schwarz P, Haase J. Behavioral modeling of complex teterogeneous microsystems[A]. In: Proc 1st Intem Forum on Design Languagues[C]. Lausanne: Swiss Federal Institute of Technology, 1998, (2): 53-62.

共引文献18

同被引文献37

  • 1霍鹏飞,马炳和,苑伟政.一种基于多端口组件网络的MEMS系统级建模方法[J].机械科学与技术,2005,24(2):192-194. 被引量：5
  • 2苏才钧,吴昊,郭占社,孟永钢,温诗铸.微构件材料力学性能测试方法[J].实验力学,2005,20(3):441-447. 被引量：15
  • 3Bart S F, Swart N R, Mariappan M, et al. An environment for MEMS design and verification[C] //Proceedings of International Conference on Modeling and Simulation of Microsystems. Santa Clara: Nano Science and Technology Institute, 1998: 386-391.
  • 4Hung E S, Senturia S D. Generation efficient dynamical models for microelectromechanical systems from a few finite-element simulation runs[J]. Journal of Microelectromechnical Systems, 1999, 8(3) : 280-289.
  • 5Zhou Guangya, Tay F E H, Fook Siong Chau. Macro-modelling of a double-gimballed electrostatic torsional micromirror [J]. Journal of Micromechanics and Mieroengineering, 2003, 13(5): 532-547.
  • 6Tang W C, Nguyen T C H, Howe R T. I.aterally driven polysilicon resonant mierostructures[J]. Sensors and Actuators, 1989, 20: 25-32.
  • 7Tang W C. Electrostatic comb drive for resonant senor and actuator applications [D]. Berkeley: Dept EECS, University of California, 1990.
  • 8Ostergaard D, Gyimesi M. Electromechanical transducer for MEMS analysis in ANSYS[C]// Proceedings of International Conference on Modeling and Simulation of Microsystems. San Juan: Nano Science and Technology Institute, 1999: 270-273.
  • 9Groothuis S. Analyzing microminature devices[J]. ANSYS Solutions, 1999, 1(1):12-15.
  • 10铁摩辛柯 古地尔著 徐芝论译.弹性理论[M].北京：高等教育出版,1990..

引证文献3

二级引证文献6

西北工业大学学报
2005年 第3期

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