1[1]Bayt R.Analysis,fabrication and testing of a MEMS-based micropropulsion system[D].Massachusetts Institute of Technology,1999.
2[2]Byat R and Breuer K.Fabrication and testing of micron-sized cold gas thrusters[C].Micropropulsion of small spacecraft,Advances in Aeronautics and Astroautics,eds.M.Micci and A.Ketsdever,AIAA-2000 Press,187.
3[3]Gulcainski F,Dulligan M and Lake J P.a.G.S.Micropropulsion research at AFRL [C].AIAA-2000- 3255.
4[4]Grisnik T,Smith S and Saltz L.Experimental study of low Reynolds number nozzles[C].AIAA 87-0992.
5[5]Hulsenberg D,Bruntsch R,Schmidt K and Reinhold F.Mikromechanische Bearbeitung von gotoempfindlichem Glas [J].Silikattechnik,1990,41:364.
6[6]Bayt R.and Breuer K S.Viscous effects in supersonic MEMS fabricated micronozzles[A].Proceedings of the 3rd ASME Microfluids Symposium,Anaheim,CA,1998
7[7]Markelov G and Ivanov,M.Numerical study of 2D/3D micronozzle flows[A].In Rarefied Gas Dynamics,eds.T.J.Bartel and M.Galiss,volume AIP,Melville,2001.
8[9]Janson S W,Helvajian H and Bruer K S.MEMS,Microengineering and aerospace systems [C].AIAA 99-3802.
