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精密磁流变抛光机床的研制 被引量:12

Development of Magnetorheological Finishing Machine
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摘要 应用磁流变抛光技术获得的表面,不仅具有较好的表面粗糙度和边缘几何形状,而且抛光面没有亚表面破坏层,并且由抛光引起的表面残余应力极小。研制了数控磁流变抛光机床,并对光学玻璃、微晶玻璃等材料进行了加工试验。
机构地区 哈尔滨工业大学
出处 《制造技术与机床》 CSCD 北大核心 2005年第7期47-49,共3页 Manufacturing Technology & Machine Tool
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参考文献7

  • 1[1]Mark R. Jolly, Jonathan W. Bender, and J. David Carlson. Properties and applications of commercial magnetorheological fluids. SPIE 1998,3327: 262 - 275
  • 2[3]William Kordonski, Stephen Jacobs. Model of Magnetorheological Finishing. Journal of Intelligent Material Systems and Structures, v 7, n 2,Mar, 1996.
  • 3[4]Stephen D. Jacobs, Donald Golini, etc. Magnetorheological finishing: a determinginistic process for optical manufacture. SPIE 1995,2576:372- 382
  • 4[5]Irene M. Peterson, Corning Incorporated. Polishing micro - optic components for use in photonic systems. SPIE 2001,4595: 30 -42
  • 5[6]Aric B. Shorey; Stephen D. Jacobs; William I. Kordonski; Roger F.Gans. Experiments and observations regarding the mechanisms of glass removal in Magnetorheological finishing. Applied Optics 2001,40:20 -33
  • 6[7]Harvey Pollicove; Don Golini. Deterministic manufacturing processes for precision optical surfaces. Key Engineering Materials 2003,238 -239:53 -58
  • 7[8]Steven R. Arrasmith, Stephen D. Jacobs, John C. Lambropoulos, Alexander Maltsev, Donald Golini, and William I. Kordonski. The use of magnetorheological finishing (MRF) to relieve residual stress and subsurface damage on lapped semiconductor silicon wafers. SPIE 2001,4451: 286 - 294

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