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铁电薄膜/半导体异质结构的研究进展 被引量:2

Research Progress in Ferroelectric Thin Film/Semiconductor Heterostructure
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摘要 综述了铁电薄膜/半导体异质结构研究近年来的新进展。重点介绍了异质结构制备工艺的改进和界面的最新研究状况。简单叙述了全钙钛矿异质结构的发展情况。指出了铁电薄膜/半导体异质结构研究领域需要解决的一些问题。 Recent studies on ferroelectric thin film/semiconductor heterostructure are discussed in this paper. Improvement of heterostructure processing methods, interface studies and development of all-perovskite heterostructure are introduced. Some key problems on heterostructure study are outlined.
出处 《人工晶体学报》 EI CAS CSCD 北大核心 2005年第3期450-453,486,共5页 Journal of Synthetic Crystals
关键词 铁电薄膜 异质结构 缓冲层 界面 全钙钛矿 ferroelectric thin film heterostructure buffer layer interface all-perovskite
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参考文献27

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二级参考文献4

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