摘要
A new concept of full vacuum manufacturing for Cu-III-IV2 thin-film solar cells has been discussed. Cu-III-IV2 thin-film solar cells manufactured using full in- line reactive sputtering will result in lower cost than that of the conventional method with CdS layer fabricated with chemical bath deposition (CBS) method. Us ing reactive sputtering process with organo- metallic gases, the compositions a nd electronic properties of Cu-III-IV2 thin-film can be fine-tuned and precisely controlled. n-type Cu-III-IV2 film and ZnS suffer layer can also be deposited u sing the in-line sputtering instead of using the CdS layer. The environmental po llution problems arising from using CdS can be eliminated and the ultimate goal of full in-line process development can then be realized. Some preliminary exper imental results on a modal solar cell fabricated by the new technique in the new concept have been presented.
A new concept of full vacuum manufacturing for Cu-III-IV2 thin-film solar cells has been discussed. Cu-III-IV2 thin-film solar cells manufactured using full in- line reactive sputtering will result in lower cost than that of the conventional method with CdS layer fabricated with chemical bath deposition (CBS) method. Us ing reactive sputtering process with organo- metallic gases, the compositions a nd electronic properties of Cu-III-IV2 thin-film can be fine-tuned and precisely controlled. n-type Cu-III-IV2 film and ZnS suffer layer can also be deposited u sing the in-line sputtering instead of using the CdS layer. The environmental po llution problems arising from using CdS can be eliminated and the ultimate goal of full in-line process development can then be realized. Some preliminary exper imental results on a modal solar cell fabricated by the new technique in the new concept have been presented.
基金
This work was suported by she Scientific Research Foundution for the Returned Overseas Chinese Scholars of State Education Minisiny(No.[2004]176)
the Science and Technology Plan of Guangdong Province(No.2003C05005).
