摘要
The article reviews the present state of the art in the magnetron sputtering of hart and superhard nanocomposite coatings. It is shown that there are (1) two gr oups of hard and superhard nanocomposites: (i) nc-MN/hard phase and (ii) nc-MN/s oft phase, (2) three possible origins of the enhanced hardness: (i) dislocation- dominated plastic deformation, (ii) cohesive forces between atoms and (iii) nano structure of materials, and (3) huge differences in the microstructure of single - and two-phase films. A main attention is devoted to the formation of nanocryst alline and/or X-ray amorphous films. Such films are created in a vicinity of tra nsitions between (i) crystalline and amorphous phases, (ii) two crystalline phas es of different chemical composition or (iii) two different preferred orientatio ns of grains of the same material from which the coating is composed. The existe nce of the last transition makes it possible to explain the enhanced hardness in single-phase films. The thermal stability and oxidation resistance of hard nano composite films is also shortly discussed.
The article reviews the present state of the art in the magnetron sputtering of hart and superhard nanocomposite coatings. It is shown that there are (1) two gr oups of hard and superhard nanocomposites: (i) nc-MN/hard phase and (ii) nc-MN/s oft phase, (2) three possible origins of the enhanced hardness: (i) dislocation- dominated plastic deformation, (ii) cohesive forces between atoms and (iii) nano structure of materials, and (3) huge differences in the microstructure of single - and two-phase films. A main attention is devoted to the formation of nanocryst alline and/or X-ray amorphous films. Such films are created in a vicinity of tra nsitions between (i) crystalline and amorphous phases, (ii) two crystalline phas es of different chemical composition or (iii) two different preferred orientatio ns of grains of the same material from which the coating is composed. The existe nce of the last transition makes it possible to explain the enhanced hardness in single-phase films. The thermal stability and oxidation resistance of hard nano composite films is also shortly discussed.
基金
This work was supported in part by the Ministry
of the Education of the Czech Republic(No.MSM#234200002)and in part by the goverment of the Czech Republic and Japan under Intermational Projects KONTAKT Czech Republic-Japan ME#173 and ME#529.
