摘要
介绍了氧化物半导体甲烷气体敏感元件的工作机理,论述了改善氧化物半导体甲烷气敏传感器性能的几种途径。采用加入催化剂、控制材料的微细结构、利用新制备工艺和表面修饰等新方法、新技术可提高氧化物半导体甲烷气敏元件的灵敏度、选择性、响应和恢复特性、稳定性。
The mechanism of semiconductor methane sensors is introduced. The new methods and new technology of improving the sensitivity, selectivity, response-recovery properties and stability of the semiconductor methane gas sensor are focused on. Adding the catalyst,controlling the microstructure of material , adopting new craft of preparation and decorating the surface of material are main ways for increasing the property of sensor element.
出处
《传感器世界》
2005年第6期6-9,共4页
Sensor World
关键词
甲烷
传感器
半导体氧化物
methane gas sensors
semionductor oxide
