摘要
分析了扩散硅绝对压力传感器的静态特性,提出了线性校正和零点校正方案,并利用Matlab软件对其性能进行了仿真,结果表明:解决了该类绝对压力传感器温漂的补偿问题,用廉价的压力敏感元件实现了对真空压力分辨到1Pa的测量.
In this paper, the steady-state characteristic of the diffused-silicon pressure sensor has been analysed , a method to calibrate it′s linearity and offset have been given out, and the Matlab software also has been used to simulate the performance of it. With this method ,the thermal drift of this kinds of sensor has been compensated . A vacuum instrument which can resolve down to 1 Pascal was developed with this low-cost pressure sensor.
出处
《中南民族大学学报（自然科学版）》
CAS
2005年第2期50-52,56,共4页
Journal of South-Central University for Nationalities：Natural Science Edition
基金
国家民委科研基金资助项目(MZY99001)
关键词
绝压传感器
温漂
线性校正
零点校正
absolute pressure sensor
thermal drift
linearity calibration
offset calibration
