4×4纵横交换微电机械系统光开关阵列

4×4 Crossbar Micro-Electro-Mechanical System Optical Matrix Switches

微电机械系统(MEMS)光开关是微电机系统技术与传统光学技术相结合的新型机械式光开关。采用纵横交换网络和通断型微镜实现4×4微电机械系统光开关阵列,利用球透镜单模光纤准直器作为微电机械系统光开关阵列的输入、输出端口。运用高斯光束耦合理论对光开关阵列插入损耗(IL)进行了理论计算,并对引起插入损耗的主要因素进行了分析。对于失调容限:输入与输出光纤准直器位置失调2μm,定位角度失调0.15°,微镜非垂直反射角度失调0.15°,制作了4×4微电机械系统光开关阵列,对其各个通道的插入损耗进行了实验测试,其中最大值为2.77dB。

Optical switches made with micro-electro-mechanical systems (MEMS) technology bear advantages of both MEMS and traditional optics. In this paper, 4 × 4 MEMS optical matrix switches are proposed, in which on-off micromirrors are arranged with crossbar switching network. Ball-lensed single-mode optical fiber collimators are used as input and output ports. With theory of Gaussian beam coupling, the insertion loss (IL) of the optical matrix switches, and also its main origins, i.e. the position misalignments and the angular misalignments, are calculated and analyzed. Some useful conclusions are drawn to guide designing such devices. With the misalignment tolerances: 2 μm of input/output lateral positioning misalignment, 0.15° for input/output angular misalignment, and 0.15° for micro-mirror angular misalignment, the insertion loss of different channels in the pilot study is tested and the highest value of that is 2.77 dB.