电压输出型线位移传感器动态检定系统

Dynamic calibrating system of linear displacement sensor with voltage output

对电压输出型线位移传感器按ZBY143-83自动检定时,很难同时满足接近测点的方向性及重复定位精度的双重要求。为此研制了动态检定系统,以双纵模双频激光干涉仪提供标准位移,采用微机接口卡高速数据采集处理技术,实现了对量程不超过500mm的传感器的高效自动检定。系统总不确定度不大于2μm,测量速度不大于20mm/s,除被测传感器安装外,全部检测工作完全由微机控制自动完成。

It is difficult to satisfy the requirements of the direction to approach the measured point and repeatable precision to position the measured point when calibrating the linear displacement sensor with voltage output automatically according to ZB Y143-83. The dynamic calibrating system is developed. Using double frequency interferometer with dual longitudinal modes to generate standard displacement and adopting high-speed technology of data collecting and processing via the computer interface board, the system can automatically calibrate the sensor with the measurable scope in 500 mm. The total uncertainty of the system is less than 2 μm, and the measuring speed is not faster than 20mm/s. Except fixing the sensor, all measuring process are controlled by computer.